Blank Cover Image

SMART CUT Technology: Industrial Status of 501 Wafer Production and New Material Developments (Invited)

著者名:
Auberton-Herve, A ( (SOITEC) )  
掲載資料名:
Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
99-3
発行年:
1999
開始ページ:
93
終了ページ:
106
総ページ数:
14
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772259 [1566772257]
言語:
英語
請求記号:
E23400/99-3
資料種別:
国際会議録

類似資料:

1 国際会議録 INVITED: SILICON ON INSULATOR WAFERS USING THE SMART CUT TECHNOLOGY

Auberton-Herve, A.J., Barge, T., Metral, F., Bruel, M., Aspar, B., Moriceau, H.

Electrochemical Society
7 国際会議録 SIMOX Technology and Applications of Wafer Bonding

Auberton-Herve, A.J., Barge, T.

Electrochemical Society
2 国際会議録 Smart-Cut Technology: An Industrial Application of Ion-Implantation-Induced Cavities

Aspar, B., Lagahe, C., Moriceau, H., Soubie, A., Bruel, M., Auberton-Herve, A. J., Barge, T., Maleville, C.

MRS - Materials Research Society
8 国際会議録 Physical phenomena involved in the Smart Cut process

Moleville, C, Aspar, B, Powneyrol, T, Moriceau, H, Bract, M, Auberton-Herve, A J, Barge, T, Metral, F

Electrochemical Society
3 国際会議録 Unibond SOI wafers achieved by Smart-Cut process

Bruel, M., Aspar, B., Maleville, C., Moriceau, H., Auberton-Herve, A.J., Barge, T.

Electrochemical Society
9 国際会議録 Characterisation of SOI substrates: application to recent SIMOX and UNIBOND wafers

Aspar, B, Moriceau, H, Auberton-Herve, A J

Electrochemical Society
4 国際会議録 Unibond SOI Wafers Achieved by Smart-Cut Process

Bruel, M., Aspar, B., Maleville, C., Moriceau, H., Auberton-Herve, A.J., Barge, T.

Electrochemical Society
10 国際会議録 (185a) A Perspective On the Impact of Material Sciences Innovations and Sustainable Development Considerations On Future Membrane Developments In the Water …

Hervé Buisson

American Institute of Chemical Engineers
5 国際会議録 The Smart-Cut Process: Status and Developments

Aspar, B., Lagahe, C., Moriceau, H., Jalaguier, E., Mas, A., Rayssac, O., Biasse, Soubie; B., Bruel, M., Auberton-Hevre, …

Electrochemical Society
11 国際会議録 (185a) A Perspective On the Impact of Material Sciences Innovations and Sustainable Development Considerations On Future Membrane Developments In the Water …

Hervé Buisson

American Institute of Chemical Engineers
6 国際会議録 Smart-Cut(R): The Basic Fabrication Process for Unibond(R) SOI Wafers

Auberton-Herve, A. J., Barge, T., Metral, F., Bruel, M., Aspar, B., Meleville, C., Moriceau, H., Poumeyrol, T.

MRS - Materials Research Society
12 国際会議録 Electrical properties of UNIBOND material

Crisroloveanu, S, lonescn, A, Maleville, C, Munteaun, D, Gil, M, Aspw, B, Bruel, M, Auberton-Herve, A J

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12