Low Energy Oxygen Implantation for Dose Reduction in SIMOX (Invited)
- 著者名:
- Anc, M J ( (Ibis Technology Corp) )
- Cordss, B F ( (Ibis Technology Corp) )
- Blake, J G ( (Ibis Technology Corp) )
- Nakai, T ( (Mitsubishi Materials Silicon Corp) )
- 掲載資料名:
- Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 99-3
- 発行年:
- 1999
- 開始ページ:
- 51
- 終了ページ:
- 60
- 総ページ数:
- 10
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772259 [1566772257]
- 言語:
- 英語
- 請求記号:
- E23400/99-3
- 資料種別:
- 国際会議録
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