SIO Flame Emission Spectroscopy from a Silane/Hydrogen/Oxygen/Argon Diffusion Flame

SIO Flame Emission Spectroscopy from a Silane/Hydrogen/Oxygen/Argon Diffusion Flame

著者名:

掲載資料名:

Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

98-23

発行年:

1998

開始ページ:

135

終了ページ:

140

総ページ数:

6

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772174 [1566772176]

言語:

英語

請求記号:

E23400/98-23

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013926
シリーズID:	PA00000028
会議名:	Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis
回次:	1st
会議開催地:	Boston, MA, USA
会議開催年:	1998.00.00

類似資料:

1 国際会議録 In Situ Monitoring of CVD for HTS Growth Wooldridge, M.S., Danezyk, S.A., Wu, J. Electrochemical Society	7 国際会議録 AMORPHOUS HYDROGENATED SILICON p-i-n SOLAR CELLS GROWN FROM HYDROGEN-DILUTED SILANE Bennett, M. S., Tu, J. C., Materials Research Society
2 国際会議録 Characterization of a Multi-Element Diffusion Burner for Combustion Synthesis Studies Torek, P.V., Hall, D.L., Miller, T.A., Wooldridge, M.S. Electrochemical Society	8 国際会議録 CHARACTERIZATION OF THE PLASMA CHEMISTRY AND FILM COMPOSITION OF PECVD SILICON NITRIDE DEPOSITED FROM SILANE-NITROGEN AND SILANE-AMMONIA MIXTURES WITH ARGON … Quinn, W.E., Bagley, B.G., Wilkens, B.J., Gallois, B.M. Materials Research Society
3 国際会議録 Measurements of the diffusion coefficient of hydrogen in silicon monitored by catalyzed enhanced oxygen diffusion jumps Newman,R.C., Tucker,J.H., McQuaid,S.A. Trans Tech Publications	9 国際会議録 On the Verification of EEDFs in Plasmas with Silane using Optical Emission Spectroscopy A. Boogaard, A. Kovalgin, I. Brunets, A. I. Aarnink, J. Holleman, R. M Wolters, J. Schmitz Electrochemical Society
4 国際会議録 Vibrational absorption from oxygen-hydrogen(Oi-H2)complexes in hydrogeBated CZ silicon Pritchard,R.E., Ashwin,M.J., Newman,R.C., Tucker,J.H., Lightowlers,E.C., Binns,M.J., Falster,R., McQuaid,S.A. Trans Tech Publications	10 国際会議録 ELASTIC SCATTERING OF POSITRONS FROM ARGON Wadehra M. J., Nahar N. S. Plenum Press
5 国際会議録 Collisional Ionization of Sodium Atoms Excited by One- and Two-Photon Absorption in a Hydrogen-Oxygen-Argon Flame Dijk, C. A. Van, Alkemade, C. Th. J. American Chemical Society	11 国際会議録 SPECTROSCOPY AND KINETICS OF AN OXYGEN GLOW DISCHARGE Touzeau M., Gousset G., Jolly J., Pagnon D., vialle M., Ferreira M. C., Loureiro J., Pinheiro M., Sa A. P. Plenum Press
6 国際会議録 Properties of Sol-Gel Coating Film from Colloidal Silica-Silane Sol M.K. Na, M.S. Ahn, H.Y. Park Trans Tech Publications	12 国際会議録 Scaling rules of phase error control for the manufacturing of alternating phase-shifting masks for 193-nm photolithography and beyond Wu, Q., Halle, S., Bukofsky, S.J., Butt, S.A., Hibbs, M.S. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12