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The Effect of Oxygen Incorporation in ELA Poly-SI Films and Its Relation to Poly-Si TFT Device Performance

著者名:
掲載資料名:
Proceedings of the fourth Symposium on Thin Film Transistor Technologies
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
98-22
発行年:
1998
開始ページ:
43
終了ページ:
50
総ページ数:
8
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772167 [1566772168]
言語:
英語
請求記号:
E23400/98-22
資料種別:
国際会議録

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