Plasma Etching of NiFeCo, NiMnSb and CoFeB-Based Multilayers

Plasma Etching of NiFeCo, NiMnSb and CoFeB-Based Multilayers

著者名:

Jung, K.B.

掲載資料名:

Proceedings of the Fifth International Sympposium on Magnetic Materials, Processes, and Devices : applications to storage and microelectromechanical systems (MEMS)

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

98-20

発行年:

1998

開始ページ:

105

終了ページ:

114

総ページ数:

10

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772143 [1566772141]

言語:

英語

請求記号:

E23400/98-20

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013923
シリーズID:	PA00000028
会議名:	International Symposium on Magnetic Materials, Processes, and Devices ; Meeting of the Electrochemical Society
回次:	5th ; 194th
会議開催地:	Boston, Massachusetts, USA
会議開催年:	1998.11.01-1998.11.06

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2 国際会議録 Dry Etching of MRAM Structures Pearton, S.J., Cho, H., Jung, K.B., Childress, J.R., Sharifi, F., Marburger, J. Materials Research Society	8 国際会議録 Selective dry etching of the GaN/InN/AlN, GaAs/AlGaAs and GaAs/InGaP systems Hays, D.C., Abernathy, C.R., Hobson, W.S., Pearton, S.J., Han, J., Shul, R.J., Cho, H., Jung, K.B., Ren, F., Hahn, Y.B. Materials Research Society
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4 国際会議録 Structural and Magnetotransport Properties of NiMnSb/Cu and NiMnSb/Ag Multilayers Caballero, J. A., Petroff, F., Cabbibo, A., Park, Y. D., Childress, J. R. MRS - Materials Research Society	10 国際会議録 Extremely High Etching Rate of In-Based III-V Semiconductors in BCl3/N2 Based Plasma Ren, F., Pearton, S.J., Hobson, W.S., Lothian, J.R., Lopata, J., Cole, M.W., Caballero, J.A. Electrochemical Society
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6 国際会議録 Dry and Wet Etch Processes for NiMnSb, LaCaMnO3, and Related Materials Hong, J., Wang, J. J., Lambers, E. S., Caballero, J. A., Childress, J. R., Pearton, S. J., Dahmen, K. H., Molnar, S. … MRS - Materials Research Society	12 国際会議録 Inductively Coupled Plasma Etching of III-Nitrides in Cl2/Xe, Cl2/Ar and Cl2/He Cho, H., Hahn, Y. B., Hays, D. C., Jung, K. B., Donovan, S. M., Abernathy, C. R., Pearton, S. J., Shul, R. J. MRS - Materials Research Society

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