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Low Temperature HF Bonding and Micropackaging for Microsystems

著者名:
Ike, S.
Shoji, S.
Kudo, H.
Nakamura, R.
Saitoh, T.
Nakanishi, H.
Nishimoto, T.
さらに 2 件
掲載資料名:
Proceedings of the International Symposium on Microstructures and Microfabricated Systems IV
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
98-14
発行年:
1998
開始ページ:
70
終了ページ:
76
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772068 [1566772060]
言語:
英語
請求記号:
E23400/98-14
資料種別:
国際会議録

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