Oxygen Precipitation and Stacking Fault Formation in Wafers with a Transition from Vacancy-Rich to Interstitial-Rich
- 著者名:
Kissinger, G. Morgenstern, G. Grabolla, T. Richter, H. Vanhellemont, J. Lambert, U. Graef, D. - 掲載資料名:
- Proceedings of the Fifth International Symposium on High Purity Silicon V
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 98-13
- 発行年:
- 1998
- 開始ページ:
- 158
- 終了ページ:
- 169
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772075 [1566772079]
- 言語:
- 英語
- 請求記号:
- E23400/98-13
- 資料種別:
- 国際会議録
類似資料:
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
Trans Tech Publications |
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
10
国際会議録
Defect-Engineered Graded GexSi1-x Buffers on Si (001) with Extreme Low Threading Dislocation Density
MRS - Materials Research Society |
Electrochemical Society |
MRS - Materials Research Society |
Trans Tech Publications |