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Influence of the Height Difference between the First and Second Nitride Layer on Erosion and Dishing in the Dual Nitride Approach for Shallow Trench Isolation

著者名:
Heylen, N.
Grillaert, J.
Vrancken, E
Badenes, G.
Rooyackers, R.
Meuris, M.
Heyns, M.
さらに 2 件
掲載資料名:
Proceedings of the Second International Symposium on Chemical Mechanical Planariarization [sic] in Integrated Circuit Device Manufacturing
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
98-7
発行年:
1998
開始ページ:
26
終了ページ:
36
出版情報:
Pennington, N. J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772013 [156677201X]
言語:
英語
請求記号:
E23400/98-7
資料種別:
国際会議録

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