Chemical Mechanical Polishing of Copper Using Silica Slurry
- 著者名:
- 掲載資料名:
- Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 98-6
- 発行年:
- 1998
- 開始ページ:
- 195
- 終了ページ:
- 205
- 総ページ数:
- 11
- 出版情報:
- Pennington, N.J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772006 [1566772001]
- 言語:
- 英語
- 請求記号:
- E23400/98-6
- 資料種別:
- 国際会議録
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