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Chemical Mechanical Polishing of Copper Using Silica Slurry

著者名:
掲載資料名:
Proceedings of the Symposia on Electrochemical Processing in ULSI Fabrication I and Interconnect and Contact Metallization: materials, processes, and reliability
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
98-6
発行年:
1998
開始ページ:
195
終了ページ:
205
総ページ数:
11
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772006 [1566772001]
言語:
英語
請求記号:
E23400/98-6
資料種別:
国際会議録

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