TIME EFFICIENT CORONA DISCHARGE METHODS FOR MAKING CAPACITANCE MEASUREMENTS FOR HIGH-DENSITY DRAM MATERIALS

TIME EFFICIENT CORONA DISCHARGE METHODS FOR MAKING CAPACITANCE MEASUREMENTS FOR HIGH-DENSITY DRAM MATERIALS

著者名:

Crenshaw, D.L.

掲載資料名:

Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

98-1(2)

発行年:

1998

開始ページ:

1610

終了ページ:

1620

総ページ数:

11

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771931 [1566771935]

言語:

英語

請求記号:

E23400/98-1

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013904
シリーズID:	PA00000028
会議名:	International Symposium on Silicon Materials Science and Technology
回次:	8th
会議開催地:	San Diego, CA, USA
会議開催年:	1998.05.04-1998.05.08

類似資料:

1 国際会議録 PROCESSING AND DEVICE ISSUES OF HIGH PERMITTIVITY MATERIALS FOR DRAMS Gnade E. B., Summerfelt R. S., Crenshaw D. Kluwer Academic Publishers	7 国際会議録 An Efficient Catalysis-Oxidation Method for the Degradation of Phenol in Wastewater B. Wu, D.L. Chai Trans Tech Publications
2 国際会議録 Evolution of Texture and Microstructure in Rough Polycrystalline Silicon for Advanced DRAM Applications Banerjee, A., Wise, R. L., Crenshaw, D. L., Khamankar, R. B., Edwards, Hal MRS - Materials Research Society	8 国際会議録 Characteristics of BaXSr1-XTiO3 thin films by metallorganic chemical vapor deposition for ultrahigh-density DRAM application Mim,B.W., Roh,J.S., Yan,J., Kwong,D.L. SPIE-The International Society for Optical Engineering
3 国際会議録 TUNGSTEN SILICIDE ZINC AS A HIGH TERMPERATURE ZINC DIFFUSION SOUCE Plumton, D.L. Materials Research Society	9 国際会議録 Efficient method for simultaneous map building and localization Hanebeck,U.D., Horn,J. SPIE-The International Society for Optical Engineering
4 国際会議録 Real-time intelligent decision making with data mining Gupta, D.P., Gopalakrishnan, B. SPIE - The International Society of Optical Engineering	10 国際会議録 Barium Strontium Titanate Capacitors for Future High Density DRAMs Jones, R.E., Jr., Zafar, S., white, B.E., Jiang, B., Melnick, B.M., Zurcher, P., Chu, P.Y., Taylor, D.J., Remmel, T.P., … Electrochemical Society
5 国際会議録 High Pressure-High Temperature Device for Making Diamond Materials Voronov, O.A., Tompa, G.S., Kear, B.H. Electrochemical Society	11 国際会議録 Efficient Gate Capacitance and Current Modeling of High-κ Gate Stacks L.F. Register, M.M. Hasan, F. Li, S. Banerjee Electrochemical Society
6 テクニカルペーパー Point-to-Plane Corona Discharge for High Speed Reacting Flow Visualization D. Wisman, B. Ganguly American Institute of Aeronautics and Astronautics	12 テクニカルペーパー Method and System for Making a Fuel-tank Inert without an Inert Gas. Gupta, A. Society of Automotive Engineers

1

2

3

4

5

6

7

8

9

10

11

12