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THE ROLE OF IMPLANTATION DAMAGE IN THE PRODUCTION OF SILICON-ON-INSULATER FILMS BY CO-IMPLANTATION OF HE+ AND H+

著者名:
Venezia, V.C.
Haynes, T.E.
Agarwal, A.
Eaglesham, D.J.
Holland, O.W.
Weldon, M.K.
Chabal, Y.J.
さらに 2 件
掲載資料名:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
98-1(2)
発行年:
1998
開始ページ:
1385
終了ページ:
1394
総ページ数:
10
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771931 [1566771935]
言語:
英語
請求記号:
E23400/98-1
資料種別:
国際会議録

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