INVITED: SILICON ON INSULATOR WAFERS USING THE SMART CUT TECHNOLOGY

INVITED: SILICON ON INSULATOR WAFERS USING THE SMART CUT TECHNOLOGY

著者名:

Auberton-Herve, A.J.

掲載資料名:

Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

98-1(2)

発行年:

1998

開始ページ:

1341

終了ページ:

1360

総ページ数:

20

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771931 [1566771935]

言語:

英語

請求記号:

E23400/98-1

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013904
シリーズID:	PA00000028
会議名:	International Symposium on Silicon Materials Science and Technology
回次:	8th
会議開催地:	San Diego, CA, USA
会議開催年:	1998.05.04-1998.05.08

類似資料:

1 国際会議録 Unibond SOI wafers achieved by Smart-Cut process Bruel, M., Aspar, B., Maleville, C., Moriceau, H., Auberton-Herve, A.J., Barge, T. Electrochemical Society	7 国際会議録 Characterisation of SOI substrates: application to recent SIMOX and UNIBOND wafers Aspar, B, Moriceau, H, Auberton-Herve, A J Electrochemical Society
2 国際会議録 Unibond SOI Wafers Achieved by Smart-Cut Process Bruel, M., Aspar, B., Maleville, C., Moriceau, H., Auberton-Herve, A.J., Barge, T. Electrochemical Society	8 国際会議録 A New Characterisation Process Used to Qualify SOI Films Moriceau, H, Aspar, B, Bruel, M, Cartier, A M, Morales, C, Soubie, A, Barge, T, Bressot, S, Maleville, C, Auberton, A I Electrochemical Society
3 国際会議録 Smart-Cut(R): The Basic Fabrication Process for Unibond(R) SOI Wafers Auberton-Herve, A. J., Barge, T., Metral, F., Bruel, M., Aspar, B., Meleville, C., Moriceau, H., Poumeyrol, T. MRS - Materials Research Society	9 国際会議録 SIMOX Technology and Applications of Wafer Bonding Auberton-Herve, A.J., Barge, T. Electrochemical Society
4 国際会議録 Smart-Cut Technology: An Industrial Application of Ion-Implantation-Induced Cavities Aspar, B., Lagahe, C., Moriceau, H., Soubie, A., Bruel, M., Auberton-Herve, A. J., Barge, T., Maleville, C. MRS - Materials Research Society	10 国際会議録 SMART CUT Technology: Industrial Status of 501 Wafer Production and New Material Developments (Invited) Auberton-Herve, A Electrochemical Society
5 国際会議録 The Smart-Cut Process: Status and Developments Aspar, B., Lagahe, C., Moriceau, H., Jalaguier, E., Mas, A., Rayssac, O., Biasse, Soubie; B., Bruel, M., Auberton-Hevre, … Electrochemical Society	11 国際会議録 New SiC on insulator wafers based on the Smart-Cut approach and their potential applications Joly, J.P., Aspar, B., Bruel, M., Di Cioccio, L., Letertre, F., Hugonnard-Bruyere, E. Kluwer Academic Publishers
6 国際会議録 Physical phenomena involved in the Smart Cut process Moleville, C, Aspar, B, Powneyrol, T, Moriceau, H, Bract, M, Auberton-Herve, A J, Barge, T, Metral, F Electrochemical Society	12 国際会議録 Strained Silicon on Insulator Wafers Made by the Smart CutTM Technology Ghyselen, B., Bogumilowicz, Y., Aulnette, C., Abbadie, A., Osternaud, B., Besson, P., Daval, N., Andrieu, F., … Materials Research Society

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