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EVALUATION OF PHYSICAL AND ELECTRICAL PROPERTIES OF MOLYBDENUM IN SILICON FOR IC PROCESSING

著者名:
Benton, J.L.
Jacobson, D.C.
Jackson, B.
Johnson, J.A.
Eaglesham, D.J.
Stevie, A.
Becerro, J.
さらに 2 件
掲載資料名:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
98-1(2)
発行年:
1998
開始ページ:
1213
終了ページ:
1223
総ページ数:
11
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771931 [1566771935]
言語:
英語
請求記号:
E23400/98-1
資料種別:
国際会議録

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