MANIPULATING ION-INDUCED DEFECTS TO IMPROVE IMPLANTATION PROCESSING OF SILICON

MANIPULATING ION-INDUCED DEFECTS TO IMPROVE IMPLANTATION PROCESSING OF SILICON

著者名:

掲載資料名:

Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

98-1(2)

発行年:

1998

開始ページ:

938

終了ページ:

947

総ページ数:

10

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771931 [1566771935]

言語:

英語

請求記号:

E23400/98-1

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013904
シリーズID:	PA00000028
会議名:	International Symposium on Silicon Materials Science and Technology
回次:	8th
会議開催地:	San Diego, CA, USA
会議開催年:	1998.05.04-1998.05.08

類似資料:

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2 国際会議録 A Method to Improve Activation of Implanted Dopants in SiC Holland, O.W., Thomas, D.K. Materials Research Society	8 国際会議録 Optimization of the Ion-Cut Process in Si and SiC Holland, O.W., Thomas, D.K., Gregory, R.B. Materials Research Society
3 国際会議録 Ion Implantation Doping in SiC and its Device Applications Rao,M.V., Gardner,J., Edwards,A., Papanicolaou,N.A., Kelner,G., Holland,O.W., Ghezzo,M., Kretchmer,J. Trans Tech Publications	9 国際会議録 In Situ Photoexcitation-Induced Suppression of Point Defect Generation in Ion Implanted Silicon Cho, C. R., Yarykin, N., Rozgonyi, G. A., Zuhr, R. A. MRS - Materials Research Society
4 国際会議録 DAMAGE FORMATION IN SEMICONDUCTORS DURING MeV ION IMPLANTATION Sjoreen, T.P., Holland, O.W., El-Ghor, M.K., White, C.W. Materials Research Society	10 国際会議録 Photoexcitation Induced Suppression of Point Defect Formation during Ion Implantation in Silicon Cho, C.R., Yarykin, N., Rozgonyi, G.A., Zuhr, R.A. Electrochemical Society
5 国際会議録 ION BEAM ANNEALING OF Si CO-IMPLANTED WITH Ga AND As Withrow, S.P., Holland, O.W., Pennycook, S.J., Pankove, J., Mascarenhas, A. Materials Research Society	11 国際会議録 THE ROLE OF IMPLANTATION DAMAGE IN THE PRODUCTION OF SILICON-ON-INSULATER FILMS BY CO-IMPLANTATION OF HE+ AND H+ Venezia, V.C., Haynes, T.E., Agarwal, A., Eaglesham, D.J., Holland, O.W., Weldon, M.K., Chabal, Y.J. Electrochemical Society
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