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VACANCY SUPERSATURATION PRODUCED BY HIGH-ENERGY ION IMPLANTATION

著者名:
Venezia, V.C.
Eaglesham, D.J.
Haynes, T.E.
Agarwal, A.
Jacobson, D.C.
Gossmann, H.-J.
Friessnegg, T.
Nielsen, B.
さらに 3 件
掲載資料名:
Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
98-1(2)
発行年:
1998
開始ページ:
926
終了ページ:
937
総ページ数:
12
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771931 [1566771935]
言語:
英語
請求記号:
E23400/98-1
資料種別:
国際会議録

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