THE CHARACTERIZATION OF 0.1 pm LPD (LIGHT POINT DEFECT) PATTERNS IN MASS PRODUCTION OF SILICON WAFER WAFER
- 著者名:
Oh, H.-S. Maeng, H.-J. Bae, K.-M. Kim, J.-R. Hong, Y.-K. Shin, J.-S. Kwon, J.-H. Rozgonyi, G.A. Lee, H.-L. - 掲載資料名:
- Silicon materials science and technology : proceedings of the Eighth International Symposium on Silicon Materials Science and Technology
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 98-1(1)
- 発行年:
- 1998
- 開始ページ:
- 707
- 終了ページ:
- 726
- 総ページ数:
- 20
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771931 [1566771935]
- 言語:
- 英語
- 請求記号:
- E23400/98-1
- 資料種別:
- 国際会議録
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