ALTERNATIVE METHODS FOR RESIST STRIPPING

ALTERNATIVE METHODS FOR RESIST STRIPPING

著者名:

掲載資料名:

Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

97-35

発行年:

1997

開始ページ:

496

終了ページ:

504

総ページ数:

9

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771887 [1566771889]

言語:

英語

請求記号:

E23400/97-35

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013897
シリーズID:	PA00000028
会議名:	International Symposium on Cleaning Technology in Semiconductor Device Manufacturing ; Fall Meeting of the Electrochemical Society
回次:	5th ; 192th
会議開催地:	Paris, France
会議開催年:	1997.09.00

類似資料:

1 国際会議録 Novel Wet Photoresist Strip for Wafer Level Packaging S. Verhaverbeke, J. Zhao Electrochemical Society	7 国際会議録 An Alternative Method of Grain Boundary Characterization M. Jedrychowski, J. Tarasiuk, B. Bacroix, S. Wroński Trans Tech Publications
2 国際会議録 THE ROLE OF THE PEROXIDE ANION AS AN OXIDIZER IN SC-1 SOLUTIONS Verhaverbeke, S., Parker, J. Electrochemical Society	8 国際会議録 NEW SHORT CYCLE WET CLEANING CONCEPT FOR 300 mm FABRICATION LINE Verhaverbeke, S., Truman, K. Electrochemical Society
3 国際会議録 Anodic Stripping Differential Alternative Pulses Voltammetry and Applications R.K. Zlatev, M.S. Stoytcheva, B.S. Valdez, J.-P. Magnin, Z. Velkova Electrochemical Society	9 国際会議録 MASS TRANSFER IN DI:O3RESIST STRIPPING Christenson, K., Nelson, S., Olim, M., Nelson, G. Electrochemical Society
4 国際会議録 An Assessment of Damage Resulting from Resist Stripping Mikulan, P.I., Koo, T.T., Awadelkarim, O.O., Fonash, S.J., Ta, T., Chan, Y.D. Electrochemical Society	10 国際会議録 Influence of Steel Strip-Feeding Process on Density and Segregation of Casting Ingot S. Zhao, D.L. Wei, J.H. Xu, H. Chen, L. Zhang Trans Tech Publications
5 国際会議録 ENGINEERING TOOLS FOR DESIGNING A METALLIC REMOVAL SOLUTION Verhaverbeke, S. Electrochemical Society	11 国際会議録 Type-II superlattice photodiodes: an alternative for VLWIR detection Brown, G.J., Houston, S., Szmulowicz, F., Mahalingam, K., Haugan, H., Wei, Y., Gin, A., Razeghi, M. SPIE-The International Society for Optical Engineering
6 国際会議録 An alternative method on camera calibration with one-dimensional objects [6027-103] Wang N., Fan Y.-Z., Bao W., Liang D., Wei S. SPIE - The International Society of Optical Engineering	12 国際会議録 The Method to Control Export-Road Dust of Strip Mine Li, Yao Ji, Li, Xiao Shuang, Geng, Wei Le Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12