Blank Cover Image

QUANTITATIVE MODELING OF H2O2 DECOMPOSITION IN SC1

著者名:
Mertens, P.
Baeyens, M.
Moyaerts, G.
Okorn-Schmidt, H.
Vos, R.
De Waele, R.
Hatcher, Z.
Hub, W.
De Gendt, S.
Knotter, M.
Meuris, M.
Heyns, M.
さらに 7 件
掲載資料名:
Proceedings of the Fifth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
97-35
発行年:
1997
開始ページ:
176
終了ページ:
183
総ページ数:
8
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771887 [1566771889]
言語:
英語
請求記号:
E23400/97-35
資料種別:
国際会議録

類似資料:

1 国際会議録 CORROSION OF ALUMINUM ALLOYS DURING DRYING OF METALLIZED WAFERS

Vos, R., Meuris, M., Mertens, P., Heyns, M., Hatcher, Z.

Electrochemical Society
7 国際会議録 Silicon Surface Metal Contamination Measurements Using Grazing-Emission XRF Spectrometry

Gendt, S. de, Kenis, K., Baeyens, M., Mertens, P. W., Heyns, M. M., Wiener, G., Kidd, S. J., Knotter, D. M., Bokx, P. K. …

MRS - Materials Research Society
2 国際会議録 Effect of Metal Contamination and Improved Cleaning Strategies

Mertens, P.W., Bearda, T., Lowewenstein, L.M., Martin, A.R., Hub, W., Kolbesen, B.O., Teerlink, I., Vos, R., Baeyens, …

Electrochemical Society
8 国際会議録 In-situ and real time characterization of wet chemical silicon surface processes by electrochemical open circuit potential measurements

Schmidt, H.F, Teerlinck, I., Meuris, M., Mertens, P.W., Heyns, M.M.

Electrochemical Society
3 国際会議録 MODELLING OF THE HYDROGEN PASSIVATION KINETICS OF Si IN DILUTE HF SOLUTIONS

Verhaverbeke, S., Meuris, M., Schmidt, H., Mertens, P., Heyns, M.

Electrochemical Society
9 国際会議録 CRITICAL ASPECTS OF WAFER CLEANING AND GATE OXIDE INTEGRITY

Mertens, P.W., Meuris, M., Schmidt, H.F., Verhaverbeke, S., Heyns, M.M., Carr, P., Graeff, D., Schnegg, A., Kubota, M., …

Electrochemical Society
4 国際会議録 ADVANCED SINGLE CHEMISTRY ALKALINE CLEANING IN A SINGLE TANK TOOL

Onsia, B., Schellkes, E., Vos, R., De Gendt, S., Doll, O., Fester, A., Kolbesen, B., Hoffman, M., Hatcher, Z., Wolke, …

Electrochemical Society
10 国際会議録 NEW WET CLEANING STRATEGIES FOR OBTAINING HIGHLY RELIABLE THIN OXIDES

Heyns, M. M., Verhaverbeke, S., Meuris, M., Mertens, P. W., Schmidt, H., Kubota, M., Philipossian, A., Dillenbeck, K., …

MRS - Materials Research Society
5 国際会議録 HF-LAST CLEANINGS: A STUDY OF THE PROPERTIES WITH RESPECT TO THE DIFFERENT VARIABLES

Verhaverbeke, S., Bender, H., Meuris, M., Mertens, P. W., Schmidt, H. F., Heyns, M. M.

MRS - Materials Research Society
11 国際会議録 VAPOR PHASE DECOMPOSITION - DROPLET COLLECTION EVALUATION OF A WAFER SURFACE PREPARATION SYSTEM

De Gendt, S., Arnauts, S., Witters, T., Boehme, W., Gonchond, J.P., Huber, A., Lerche, J., Loewenstein, L., Rink, I., …

Electrochemical Society
6 国際会議録 18 Optimized HF Solutions in ULSI Technology

Teerlinck, I., Mertens, P.W., Vos, R., Meuris, M., Heyns, M.M.

Electrochemical Society
12 国際会議録 *CLEANING OF METAL CONTAMINATION

Mertens, P.W., Hurd, T.Q., Graf, D., Meuris, M., Schmidt, H.F., Heyns, M.M.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12