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Ion Implantation in Wide Bandgap Semiconductors: Device Needs and Technological Challenges

著者名:
掲載資料名:
Proceedings of the Second Symposium on III-V Nitride Materials and Processes
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
97-34
発行年:
1997
開始ページ:
76
終了ページ:
82
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771870 [1566771870]
言語:
英語
請求記号:
E23400/97-34
資料種別:
国際会議録

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