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Deposition of Hydrogenated Carbon Film in a Magnetically Confined RF CH4/H2 Plasma

著者名:
Kurashima, N.
Akita, K.
Kurata, T.
Shinoda, H.
Minemura, S.
Mutsukura, N.
さらに 1 件
掲載資料名:
Proceedings of the Fifth International Symposium on Diamond Materials
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
97-32
発行年:
1997
開始ページ:
189
終了ページ:
196
出版情報:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771856 [1566771854]
言語:
英語
請求記号:
E23400/97-32
資料種別:
国際会議録

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