Statistical Modeling and Experimental Verification of Electromigration Time to Fail Distribution in Metal Interconnects
- 著者名:
Capasso, C. Gall, M. Anderson, S. Jawarani, D. Hernandez, R. Kawasaki, H. - 掲載資料名:
- Proceedings of the Symposium on Interconnect and Contact Metallization
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 97-31
- 発行年:
- 1997
- 開始ページ:
- 196
- 終了ページ:
- 202
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771849 [1566771846]
- 言語:
- 英語
- 請求記号:
- E23400/97-31
- 資料種別:
- 国際会議録
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10
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Modelling of Failure Time Distributions for Interconnects Due to Stress Voiding and Electromigration
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