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Electrical Characteristics of CVD Copper Interconnects and Vias

著者名:
Nguyen, T.
Ono, Y.
Evans, D.R.
Senzaki, Y.
Kobayashi, M.
Charmeski, L.J.
Ulrich, B.D.
Hsu, S.T.
さらに 3 件
掲載資料名:
Proceedings of the Symposium on Interconnect and Contact Metallization
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
97-31
発行年:
1997
開始ページ:
120
終了ページ:
128
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771849 [1566771846]
言語:
英語
請求記号:
E23400/97-31
資料種別:
国際会議録

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