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Interface and Volume Defects in SiNx:H/<100>Si Prepared by DECR Plasma Deposition

著者名:
Aubert, P.
Delmotte, F.
Hugon, M.C.
Agius, B.
Cantin, J.L.
von Bardeleben, H.J.
さらに 1 件
掲載資料名:
Proceedings of the International Symposium on Thin Film Materials, Processes, Reliability, and Applications, Thin Film Processes
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
97-30
発行年:
1997
開始ページ:
283
終了ページ:
291
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771832 [1566771838]
言語:
英語
請求記号:
E23400/97-30
資料種別:
国際会議録

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