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Thin Film Measurements by Spectroscopic Ellipsometry Over an Extended Range

著者名:
Cox, J.N.
Hutchinson, J.M.
Lee, K.K.D.
Sheridan, B.
Wong, R.
Yang, I.-C.J.
さらに 1 件
掲載資料名:
Chemical vapor deposition : proceedings of the Fourteenth International Conference and EUROCVD-11
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
97-25
発行年:
1997
開始ページ:
636
終了ページ:
643
総ページ数:
8
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771788 [1566771781]
言語:
英語
請求記号:
E23400/97-25
資料種別:
国際会議録

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