Integration of Low-k Dielectric s for High Performance 0.18um Interconnects
- 著者名:
Singh, A. Dixit, G.A. List, R.S. Ralston, A.R.K. Aldrich, D. Russell, S.W. Nag, S. Gaynor, J. Jin, C. McKerrow, A.J. Lee, W. Havemann, R.H. Luttmer, J.D. - 掲載資料名:
- Proceedings of the Second International Symposium on Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 97-8
- 発行年:
- 1997
- 開始ページ:
- 102
- 終了ページ:
- 111
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771351 [1566771358]
- 言語:
- 英語
- 請求記号:
- E23400/97-8
- 資料種別:
- 国際会議録
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