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Lattice Strain and Defects in Epitaxial Silicon Wafers

著者名:
Kirscht, F.
Snegirev, B.
Zaumseil, P.
Kissinger, G.
Takashima, K.
Wildes, P.
Hennessy, J.
さらに 2 件
掲載資料名:
Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
97-12
発行年:
1997
開始ページ:
60
終了ページ:
67
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771399 [1566771390]
言語:
英語
請求記号:
E23400/97-12
資料種別:
国際会議録

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