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Using Trimethylsilane to Improve Safety, Throughput and Versatility in PECVD processes

著者名:
掲載資料名:
Proceedings of the Symposium on Silicon Nitride and Silicon Dioxide Thin Insulating Films
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
97-10
発行年:
1997
開始ページ:
443
終了ページ:
453
総ページ数:
11
出版情報:
Pennington, New Jersey: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771375 [1566771374]
言語:
英語
請求記号:
E23400/97-10
資料種別:
国際会議録

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