Mechanical Behavior of AlNiCr Blanket Films and Stacks of Films During Thermal Cycling
- 著者名:
- 掲載資料名:
- ULSI science and technology, 1997 : proceedings of the Sixth International Symposium on Ultralarge Scale Integration Science and Technology
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 97-3
- 発行年:
- 1997
- 開始ページ:
- 371
- 終了ページ:
- 384
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771306 [1566771307]
- 言語:
- 英語
- 請求記号:
- E23400/970512
- 資料種別:
- 国際会議録
類似資料:
MRS-Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
Materials Research Society |
MRS - Materials Research Society |
9
国際会議録
EVOLUTION OF STRESS DURING FORMATION OF TITANIUM DISILICIDE BY RTA AND TUBE FURNACE ANNEALING
Materials Research Society |
MRS - Materials Research Society |
SPIE-The International Society for Optical Engineering |
MRS - Materials Research Society |
11
国際会議録
The Kinetics of Tungsten Deposition from a H2/WF6- Mixture Studied by In-Situ Laser Raman Scattering
Electrochemical Society |
Materials Research Society |
Materials Research Society |