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In Situ Etching and Chemical Beam Epitaxy of Carbon-Doped AlxGa1-xAs Using Trisdimethylaminoarsenic

著者名:
掲載資料名:
Proceedings of the twenty-sixth State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXVI)
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
97-1
発行年:
1997
開始ページ:
10
終了ページ:
18
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771283 [1566771285]
言語:
英語
請求記号:
E23400/970510
資料種別:
国際会議録

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