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Hydrogenation Effect of Heterostructured CMOS Thin-Film Transistors in Low Temperature (<-550℃) RTCVD Films

著者名:
Lee, S.K.
Choe, S.M.
Ahn, C.G.
Chung, W.J.
Kwon, Y.K.
Kang, B.K.
Kim, O.
Park, Y.B.
Rhee, S.W.
さらに 4 件
掲載資料名:
Proceedings of the Third Symposium on Thin Film Transistor Technologies
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
96-23
発行年:
1996
開始ページ:
358
終了ページ:
365
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771733 [1566771730]
言語:
英語
請求記号:
E23400/970103
資料種別:
国際会議録

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Kang, H.S., Ahn, C.G., Lee, S.H., Kim, K.I., Kang, B.K., Bae, Y.H., Kwon, Y.K.

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