Blank Cover Image

Effect of Processing Temperature on Polysilicon Thin-Film Transistors with Liquid-Phase Deposited Oxide as Gate Insulator

著者名:
掲載資料名:
Proceedings of the Third Symposium on Thin Film Transistor Technologies
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
96-23
発行年:
1996
開始ページ:
89
終了ページ:
94
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771733 [1566771730]
言語:
英語
請求記号:
E23400/970103
資料種別:
国際会議録

類似資料:

1 国際会議録 High Performance Low Temperature Polysilicon TFT's with Ultra-thin Liquid-phase Deposited Gate Oxide and N2O Plasma Treatment

Yeh, C-F., Wang, S.-C., Jeng, J.-N., Lu, C.-Y.

Electrochemical Society
7 国際会議録 Stepped Gate Polysilicon Thin-Film Transistor for Large Area Power Applications

Aschenbeck, J., Chen, Y., Clough, F., Xu, Y. Z., Narayanan, E. M. Sankara, Milne, W. I.

MRS - Materials Research Society
2 国際会議録 In-Situ O-Plasma Passivation Effect on Poly-Si TFTs During Ion Plating Capping Oxide

Yeh, C.F., Chen, T.J., Lin, M.T., Kao, J.S.

Electrochemical Society
8 国際会議録 Behavior of Polysilicon Thin Film Transistors with Thin Gate Oxides

Lifshitz, N., Luryi, S.

Electrochemical Society
3 国際会議録 Approach to Room Temperature Process - A Novel Thin Liquid Phase Deposited Oxide

Yeh, Ching-Fa, Lin, Shyue-Shyh

Electrochemical Society
9 国際会議録 CMOS POLYSILICON THIN FILM TRANSISTORS WITH SIMULTANEOUSLY DEPOSITED LAYERS FOR SOURCE-DRAIN AND GATE

Huang, T. Y., Tsai, C. C., Wu, I. W., Lewis, A. G., Chiang, A., Bruce, R. H.

Materials Research Society
4 国際会議録 FLUORINATED GATE OXIDE FILMS UTILIZED IN POLYSILICON THIN FILM TRANSISTORS

Kouvatsos, Dimitrios N., Kung, Ji-Ho, Hatalis, Miltiadis K., Jaccodine, Ralph J.

Materials Research Society
10 国際会議録 Gate Oxide Integrity for Polysilicon Thin-Film Transistors: A Comparative Study for ELC, MILC, and SPC Crystallized Active Polysilicon Layer

Choi, D.C., Choi, B.D., Jung, J.Y., Park, H.H., Seo, J.W., Lee, K.Y., Chung, H.K.

Materials Research Society
5 国際会議録 Gate Planarization of Amorphous Silicon Thin Film Transistor with Liquid Phase Deposition Process

Chen, M.S., Chou, J.S., Lee, S.C.

Electrochemical Society
11 国際会議録 High-performance polysilicon air-gap thin film transistor on low-temperature substrates

Mahfoz-Kotb, H., Salaun, A.-C., Mohammed-Brahim, T., Coulon, N., Bonnaud, O., Mevellec, J.-Y.

SPIE-The International Society for Optical Engineering
6 国際会議録 Stepped Gate Polysilicon Thin-Film Transistor for Large Area Power Applications

Aschenbeck, J., Chen, Y., Clough, F., Xu, Y. Z., Narayanan, E. M. Sankara, Milne, W. I.

MRS - Materials Research Society
12 国際会議録 Fabrication of thin film transistors on plastic substrates by spin etching and device transfer process

Wang, S.-C., Hsu, C.-T., Yeh, C.-F., Lou, J.-C.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12