Electrochemical Interactions during the Chemical Mechanical Planarization of Copper in Ammonia Based Slurries
- 著者名:
- 掲載資料名:
- Proceedings of the First International Symposium on Chemical Mechanical Planarization
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 96-22
- 発行年:
- 1996
- 開始ページ:
- 110
- 終了ページ:
- 120
- 総ページ数:
- 11
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771726 [1566771722]
- 言語:
- 英語
- 請求記号:
- E23400/970318
- 資料種別:
- 国際会議録
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6
国際会議録
Electrochemical Aspects of Copper Chemical Mechanical Planarization (CMP) in Peroxide Based Slurry
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