Dependence of the Gate Oxide Integrity on the Crystal Originated Defects in Czochralski Silicon Wafers

Dependence of the Gate Oxide Integrity on the Crystal Originated Defects in Czochralski Silicon Wafers

著者名:

掲載資料名:

Proceedings of the Fourth International Symposium on High Purity Silicon

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

96-13

発行年:

1996

開始ページ:

151

終了ページ:

159

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771566 [1566771560]

言語:

英語

請求記号:

E23400/963433

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013846
シリーズID:	PA00000028
会議名:	International Symposium on High Purity Silicon ; Meeting of the Elecrochemical Society
回次:	4th ; 190h
会議開催地:	San Antonio, Texas, USA
会議開催年:	1996.10.06-1996.10.11

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2 国際会議録 Investigation on Low Density Defects in Czochralski Silicon Crystals: Their Detectability, Formation Kinetics and Influence on Gate Oxide Integrity Borionetti, G., Godio, P., Porrini, M., Ilic, S. Electrochemical Society	8 国際会議録 The Impact of the Dwell Time Above 900℃ During Crystal Growth on the Gate Oxide Integrity of Silicon Wafers Dornberger, E., von Ammon, W., Graef, D., Lambert, U., Miller, A., Oelkrug, H., Ehlert, A. Electrochemical Society
3 国際会議録 Numerical Simulation of Point Defect Distributions in a Growing Czochralski Silicon Crystal in Response to an Abrupt Change in the Growth Conditions Wijaranakula, W., Zhang, Q. S., Takano, K., Yamagishi, H. MRS - Materials Research Society	9 国際会議録 CRITICAL ASPECTS OF WAFER CLEANING AND GATE OXIDE INTEGRITY Mertens, P.W., Meuris, M., Schmidt, H.F., Verhaverbeke, S., Heyns, M.M., Carr, P., Graeff, D., Schnegg, A., Kubota, M., … Electrochemical Society
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6 国際会議録 Vacancy Aggregation Mechanism During Czochralski Silicon Crystal Growth Wijaranakula, W., Takano, K., Yamagishi, H. Electrochemical Society	12 国際会議録 Organic Contamination of Silicon Wafer in Clean Room Air and Its Impact to Gate Oxide Integrity Imafuku, D., Mizubayashi, W., Miyazaki, S., Hirose, M., Wakayama, Y., Kobayashi, S. MRS - Materials Research Society

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