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A Large Area Multi-Frequency Multi-Planar Coil Inductively Plas- ma Source

著者名:
掲載資料名:
Proceedings of the eleventh International Symposium on Plasma Processing
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
96-12
発行年:
1996
開始ページ:
126
終了ページ:
136
総ページ数:
11
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771641 [1566771641]
言語:
英語
請求記号:
E23400/962354
資料種別:
国際会議録

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