New etchant for the fabrication of porous silicon

New etchant for the fabrication of porous silicon

著者名:

掲載資料名:

Proceedings of the First Symposium on III-V Nitride Materials and Processes

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

96-11

発行年:

1996

開始ページ:

180

終了ページ:

185

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771634 [1566771633]

言語:

英語

請求記号:

E23400/962353

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013844
シリーズID:	PA00000028
会議名:	Symposium on III-V Nitride Materials and Processes
回次:	1st
会議開催地:	Los Angeles, CA. USA
会議開催年:	1996.05.06-1996.05.08

類似資料:

1 国際会議録 New developments in the integration of micromachined sensors Sarro,P.M., French,P.J., Gennissen,P.T.J. SPIE-The International Society for Optical Engineering	7 国際会議録 Bipolar compatible epitaxial poly for surface-micromachined smart sensors Gennissen,P.T., French,P.J., Bartek,M., Sarro,P.M., Boogaard,A.van der, Visser,C. SPIE-The International Society for Optical Engineering
2 国際会議録 BuIk-micromachined pressure sensor based on epi-poly techniques Gennissen,P.T.J., Ashruf,C.M.A.., Kaak,M., French,P.J., Sarro,P.M. SPIE-The International Society for Optical Engineering	8 国際会議録 Strain effects in multilayers Ashruf,C.M.A., French,P.J., de Boer,C., Sarro,P.M. SPIE-The International Society for Optical Engineering
3 国際会議録 Development of silicon accelerometers using epi-micromachining Gennissen,P.T.J., French,P.J. SPIE - The International Society for Optical Engineering	9 国際会議録 Pressure and flow sensor for use in catheters Goosen,J.F.L., French,P.J., Sarro,P.M. SPIE - The International Society for Optical Engineering
4 国際会議録 Galvanic etching of silicon Ashruf,C.M.A., French,P.J., Sarro,P.M., Kelly,J.J. SPIE-The International Society for Optical Engineering	10 国際会議録 Fabrication technology for micromachined spatial light modulators Sakarya, S., Vdovin, G.V., Sarro, P.M. SPIE-The International Society for Optical Engineering
5 国際会議録 Integration technology (Invited Paper) French,P.J., Sarro,P.M. SPIE-The International Society for Optical Engineering	11 国際会議録 Low-loss small-cross-section silicon-on-silicon rib waveguides with high-confining ion-implanted lower cladding Iodice,M., Cocorullo,G., Corte,F.G.Della, Polichetti,T., Rendina,I., Sarro,P.M. SPIE - The International Society for Optical Engineering
6 国際会議録 Applications of bipolar compatible epitaxial polysilicon Gennissen,P.T.J., French,P.J. SPIE-The International Society for Optical Engineering	12 国際会議録 Technological approaches for fabrication of elastomer-based spatial light modulators Sakarya, S., Vdovin, G.V., Sarro, P.M. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12