Advanced LPCVD BPSG Deposition for Sub-0.25μm Microelectronic Fabrication
- 著者名:
- 掲載資料名:
- Proceedings of the Thirteenth International Symposium on Chemical Vapor Deposition
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 96-5
- 発行年:
- 1996
- 開始ページ:
- 863
- 終了ページ:
- 868
- 総ページ数:
- 6
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771559 [1566771552]
- 言語:
- 英語
- 請求記号:
- E23400/962104
- 資料種別:
- 国際会議録
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