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Dry Etch Development of W/WSi Short Gate MESFETs

著者名:
Shul, R.J.
Sherwin, M.E.
Baca, A.G.
Zolper, J.C.
Rieger, D.J.
Briggs, R.D.
さらに 1 件
掲載資料名:
Proceedings of the Twenty-fourth State-of-the-Art Program on Compound Semiconductors
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
96-2
発行年:
1996
開始ページ:
162
終了ページ:
174
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771528 [1566771528]
言語:
英語
請求記号:
E23400/962066
資料種別:
国際会議録

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