EPR Study of the Defects in Porous Si/SiO x N y and Si0.80Ge0.20/SiGeO2

EPR Study of the Defects in Porous Si/SiO x N y and Si0.80Ge0.20/SiGeO2

著者名:

Cantin, J.L.

掲載資料名:

The physics and chemistry of SiO[2] and the Si-SiO[2] interface-3, 1996 : proceedings of the Third International Symposium on the Physics and Chemistry of SiO[2] and the Si-SiO[2] Interface

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

96-1

発行年:

1996

開始ページ:

28

終了ページ:

45

総ページ数:

18

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771511 [156677151X]

言語:

英語

請求記号:

E23400/962115

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013835
シリーズID:	PA00000028
会議名:	International Symposium on the Physics and Chemistry of SiO2 and the Si-SiO2 Interface
回次:	3rd
会議開催地:	Los Angeles, CA, USA
会議開催年:	1996.05.05-1996.05.10

類似資料:

1 国際会議録 EPR Studies of Interface Defects in n-Type 6H-SiC/SiO2 Using Porous SiC von Bardeleben, H.J., Cantin, J.L., Mynbaeva, M., Saddow, S.E. Trans Tech Publications	7 国際会議録 Interface Defects in n-Type 3C-SiC/SiO2: An EPR Study of Oxidized Porous Silicon Carbide Single Crystals Bardeleben, H. J. von, Cantin, J. L., Ke, L., Shishkin, Y., Devaty, R. P., Choyke, W. J. Trans Tech Publications
2 国際会議録 Microscopic Structure and Electrical Activity of 4H-SiC/SiO2 Interface Defects : an EPR Study of Oxidized Porous SiC von Bardeleben, H.J., Cantin, J.L., Shishkin, Y., Devaty, R.P., Choyke, W.J. Trans Tech Publications	8 国際会議録 EPR Study of Electron Irradiation-Induced Defects in Semi-Insulating SiC:V von Bardeleben, H.J., Cantin, J.L., Reshanov, S.A., Rastegaev, V.P. Trans Tech Publications
3 国際会議録 Defect and Composition Analysis of as-deposited and Nitrided (100)Si/SiO2/Hf1-xSiO2 Stacks byElectron Paramagnectic Resonance and Ion Beam Analysis von Bardeleben, H. J., Cantin, J. L., Ganem, J. J., Trimaille, I., Gusev, E. P. Springer	9 国際会議録 EPR Studies of SiCISiO2 Interfaces in n-type 4H-and 6H- Oxidized Porous SIC von Bardeleben, H.J., Cantin, J.L., Mynbaeva, M., Saddow, S.E., Shishkin, Y., Devaty, R.P., Choyke, W.J. Electrochemical Society
4 国際会議録 Forming Gas Annealing of the Carbon PbC Center in Oxidized Porous 3C- and 4H-SiC: An EPR Study Cantin, J.L., von Bardeleben, H.J. Trans Tech Publications	10 国際会議録 Furnace oxynitridation in nitric oxide of thin silicon oxide: Atomic transport mechanisms and interfacial microstructure Trimaille, I., Ganem, J-J., Gosset, L. G., Bailly, O., Rigo, S., Cantin, J-L., Bardeleben, H. J. von MRS-Materials Research Society
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6 国際会議録 Electron Paramagnetic Resonance Study of Defects at Nitric Oxide Treated Si/SiO2 and Si/Si3N4 Interfaces Cantin, J.L., von Bardeleben, H.-J. Electrochemical Society	12 国際会議録 Phosphorus-Related Shallow and Deep Defects in 6H-SiC Baranov, P.G., Ilyin, I.V., Mokhov, E.N., von Bardeleben, H.J., Cantin, J.L. Trans Tech Publications

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