CMOS Compatible Silicon Micromachining Using TMAH

CMOS Compatible Silicon Micromachining Using TMAH

著者名:

掲載資料名:

Proceedings of the Second International Symposium on Microstructures and Microfabricated Systems

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

95-27

発行年:

1995

開始ページ:

272

終了ページ:

279

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771238 [1566771234]

言語:

英語

請求記号:

E23400/961024

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013831
シリーズID:	PA00000028
会議名:	International Symposium on Microstructures and Microfabricated Systems ; Meeting of the Electrochemical Society
回次:	2nd ; 188th
会議開催地:	Chicago, IL, USA
会議開催年:	1995.10.08-1995.10.13

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