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An Optimized LIGA/MEMS Process for Polymer Waveguides on a Linear Microactuator

著者名:
Ghodssi, R.
White, V.
Heidey, C.
Archie, C.
Denton, D.D.
McCaughan, L.
さらに 1 件
掲載資料名:
Proceedings of the Second International Symposium on Microstructures and Microfabricated Systems
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
95-27
発行年:
1995
開始ページ:
141
終了ページ:
150
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771238 [1566771234]
言語:
英語
請求記号:
E23400/961024
資料種別:
国際会議録

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