A Micromachined Diaphragm Micropump

A Micromachined Diaphragm Micropump

著者名:

掲載資料名:

Proceedings of the Second International Symposium on Microstructures and Microfabricated Systems

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

95-27

発行年:

1995

開始ページ:

67

終了ページ:

72

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771238 [1566771234]

言語:

英語

請求記号:

E23400/961024

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013831
シリーズID:	PA00000028
会議名:	International Symposium on Microstructures and Microfabricated Systems ; Meeting of the Electrochemical Society
回次:	2nd ; 188th
会議開催地:	Chicago, IL, USA
会議開催年:	1995.10.08-1995.10.13

類似資料:

1 国際会議録 Dynamic actuation behavior of NiTi/Si diaphragm micropump Xu,D., Wang,L., Ding,G., Zhou,Y., Yu,A., Cheng,X., Chen,J., Cai,B. SPIE-The International Society for Optical Engineering	7 国際会議録 Application of a plastic diaphragm for a silicon micropump Kang,I.-B., Son,M.-T., Haskard,M.R., Samaan,N.D., Ju,B.-K. SPIE-The International Society for Optical Engineering
2 国際会議録 Strength of Surface Micromachined Diaphragms Yang, Xing, Siu, Frances M., Tai, Yu-Chong MRS - Materials Research Society	8 国際会議録 Micromachined flow-handing components:micropumps Soerensen,O., Drese,K.S., Ehrfeld,W., Hartmann,H.-J. SPIE - The International Society for Optical Engineering
3 国際会議録 Surface-micromachined electrostatic diaphragm micropump Jang,W.I., Lee,Y.I., Choi,C.A., Jun,C.H., Kim,Y.T. SPIE - The International Society for Optical Engineering	9 国際会議録 AlN thin films prepared by reactive ion beam coating Cheng, L. L., Yu, Y. H., Sundaravel, B., Luo, E. Z., Lin, S., Lei, Y. M., Ren. C. X., Cheung, W. Y., Wong, S. P., Xu, J. … MRS-Materials Research Society
4 国際会議録 (382c) Determining Reactive Oxygen and Nitrogen Species in Cells By Microchip Electrophoresis Susan Lunte American Institute of Chemical Engineers	10 国際会議録 Silicon micromachined poppet valve with an octagonal diaphragm Siekkinen,J.W., Haltiner,K.J., Chilcott,D.W., Huang,L.X., Staller,S.E. SPIE-The International Society for Optical Engineering
5 国際会議録 Dynamic Characteristic Analysis of the Micropump Considering the Diaphragm Stiffness D. Jiang, S.J. Li, G. Bao Trans Tech Publications	11 国際会議録 Structual optimization of NiTi/Si diaphragm used in micropumps Wang, L., Chen, J., Xu, D., Cai, B. SPIE-The International Society for Optical Engineering
6 国際会議録 A Micropump for Droplet Ejection Cheng, C.H., Chen, S.C., Lin, Y.C. Trans Tech Publications	12 国際会議録 Structural and Optical Properties of SiC Films Deposited on Si by DC Magnetron Sputtering Lei, Y.M., Yu, Y.H., Cheng, L.L., Lin, L., Sundaraval, B., Luo, E.Z., Lin, S., Ren, C.X., Cheung, W.Y., Wong, S.P., Xu, … Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12