Blank Cover Image

Extremely High Etching Rate of In-Based III-V Semiconductors in BCl3/N2 Based Plasma

著者名:
Ren, F.
Pearton, S.J.
Hobson, W.S.
Lothian, J.R.
Lopata, J.
Cole, M.W.
Caballero, J.A.
さらに 2 件
掲載資料名:
Proceedings of the Symposium on Wide Bandgap Semiconductors and Devices and the Twenty-Third State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXIII)
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
95-21
発行年:
1995
開始ページ:
346
終了ページ:
353
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771160 [1566771161]
言語:
英語
請求記号:
E23400/961020
資料種別:
国際会議録

類似資料:

Ren, F., Pearton, S.J., Lothian, J.R., Abernathy, C.R., Hobson, W.S.

Materials Research Society

Shul, R. J., Ashby, C. I. H., Willison, C. G., Zhang, L., Han, J., Bridges, M. M., Pearton, S. J., Lee, J. W., Lester, …

MRS - Materials Research Society

Cole, M.W., Han, W.Y., Pfeffer, R.L., Eckart, D.W., Pang, S.W., Ko, K.K., Ren, F., Hobson, W.S., Lothian, J.R., Lopata, …

Electrochemical Society

Pearton, S. J., Chakrabarti, U. K., Katz, A., Ren, F., Fullowan, T. R., Abernathy, C R., Hobson, W. S.

Materials Research Society

Lee, J.W., Pearton, S.J., Lambers, E.S., Mileham, J.R., Abernathy, C.R., Hobson, W.S., Ren, F., Shul, R.J.

Electrochemical Society

Pearton, S.J., Jung, K.B., Hong, J., Lee, J.W., Caballero, J.A., Childress, J.R., Jenson, M., Hurst, A.T., Jr.

Electrochemical Society

Ren, F., Hobson, W. S., Lothian, J. R., Lopata, J., Caballero, J. A., Lee, J. W., Pearton, S. J., Cole, M. W.

MRS - Materials Research Society

Ren, F., Hong, M.W., Hobson, W.S., Kuo, J.M., Lothian, J.R., Mannaerts, J.P., Kwo, J., Chu, S.N.G., Chen, Y.K., Cho, …

Electrochemical Society

Pearton, S.J., Chakrabarti, U.K., Baiocchi, F.A., Hobson, W.S.

Materials Research Society

Shul, R. J., Briggs, R. D., Han, J., Pearton, S. J., Lee, J. W., Vartuli, C. B., Killeen, K. P., Ludowise, M. J.

MRS - Materials Research Society

Lee, J.W., Santana, C.J., Abernathy, C.R., Pearton, S.J., Ren, F., Hobson, W.S., Lothian, J.R., Wu, C.S.

Electrochemical Society

Pearton, S.J., Chakrabarti, U.K., Katz, A., Abernathy, C.R., Hobson, W.S., Ren, F., Fullowan, T.R.

Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12