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Damage Investigation of GaAs and InGaP Dry Etched with an Electron Cyclotron Resonance Source

著者名:
Cole, M.W.
Han, W.Y.
Pfeffer, R.L.
Eckart, D.W.
Pang, S.W.
Ko, K.K.
Ren, F.
Hobson, W.S.
Lothian, J.R.
Lopata, J.
Caballero, J.A.
Pearton, S.J.
さらに 7 件
掲載資料名:
Proceedings of the Symposium on Wide Bandgap Semiconductors and Devices and the Twenty-Third State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXIII)
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
95-21
発行年:
1995
開始ページ:
293
終了ページ:
306
総ページ数:
14
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771160 [1566771161]
言語:
英語
請求記号:
E23400/961020
資料種別:
国際会議録

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