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Implantation and Annealing of Wide Bandgap Materials

著者名:
Wilson, R.G.  
掲載資料名:
Proceedings of the Symposium on Wide Bandgap Semiconductors and Devices and the Twenty-Third State-of-the-Art Program on Compound Semiconductors (SOTAPOCS XXIII)
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
95-21
発行年:
1995
開始ページ:
152
終了ページ:
162
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771160 [1566771161]
言語:
英語
請求記号:
E23400/961020
資料種別:
国際会議録

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