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THE REACTION OF VAPOR HF WITH CHEMICALLY FORMED SILICON OXIDE: PRODUCTION OF STABLE HYDROGEN- TERMINATED SURFACES

著者名:
Barnett, J.M.
Grothe, P.A.
Martin, J.S.
Carpio, R.A.
Fowler, B.W.
Atluri, Vasu
Herbots, Nicole
さらに 2 件
掲載資料名:
Proceedings of the Fourth International Symposium on Cleaning Technology in Semiconductor Device Manufacturing
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
95-20
発行年:
1995
開始ページ:
126
終了ページ:
133
総ページ数:
8
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771153 [1566771153]
言語:
英語
請求記号:
E23400/962140
資料種別:
国際会議録

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