Blank Cover Image

Probing the Interface of Bonded Silicon Wafers with Inferred Spectroscopy

著者名:
掲載資料名:
Proceedings of the Third International Symposium on Semiconductor Wafer Bonding : physics and applications
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
95-7
発行年:
1995
開始ページ:
305
終了ページ:
314
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771016 [1566771013]
言語:
英語
請求記号:
E23400/952067
資料種別:
国際会議録

類似資料:

1 国際会議録 Mechanistic Studies of Silicon Wafer Bonding and Layer Exfoliation

Weldon, M.K., Marsico, V.E., Chabal, Y.J., Agarwal, A., Eaglesham, D.J., Sapjeta, J., Brown, W.L., Jacobson, D.C., …

Electrochemical Society
7 国際会議録 Electrical and Structural Characterization of the Interface of Wafer Bonded InP/Si

Morral, A. Fontcuberta i, Zahler, J. M., Atwater, Harry A., Frank, M. M., Chabal, Y. J., Ahrenkiel, P., Wanlass, M.

Materials Research Society
2 国際会議録 Spectroscopic and Theoretical Investigations of Hydrogen-Induced Exfoliation of Silicon: Si-H Bending Modes

Caudano, Y., Weldon, M.K., Chabal, Y.J., Stefanov, B.B., Raghavachari, K., Jacobson, D.C., Christman, S.B., Chaban, E.E.

Electrochemical Society
8 国際会議録 Electrical and Structural Characterization of the Interface of Wafer Bonded InP/Si

Morral, A. Fontcuberta i, Zahler, J. M., Atwater, Harry A., Frank, M. M., Chabal, Y. J., Ahrenkiel, P., Wanlass, M.

Materials Research Society
3 国際会議録 Infrared spectroscopy of oxide formation at silicon interfaces

Weldoit, M K, Chabal, Y J, Chrisman, S B, Chaban, E E, Feldman, L C, Goodwin, C A, Hsieh, C-M

Electrochemical Society
9 国際会議録 Dynamics of interface traps in bonded silicon wafers

Khorasani, S., Motieifar, A., Rashidian. B.

SPIE-The International Society for Optical Engineering
4 国際会議録 Silicon Surface Chemistry by IR Spectroscopy in the Mid- to Far-IR Region: H2O and Ethanol on Si(100)

Struck, L. M., Eng, J., Jr., Bent, B. E., Chabal, Y. J., Williams, G. P., White, A. E., Christman, S., Chaban, E. E., …

MRS - Materials Research Society
10 国際会議録 *ETCHING OF SILICON (111) AND (100) SURFACES IN HF SOLUTIONS: H-TERMINATION, ATOMIC STRUCTURE AND OVERALL MORPHOLOGY

Chabal, Y.J.

Materials Research Society
5 国際会議録 High Volume Manufacturing of SOI Bonded Wafers

Easter, W.G, Goodwin, C.A., Hsieh, C.M., Shanaman, R.H., Wallace, S.W., Worrell, M.J.

Electrochemical Society
11 国際会議録 Photoluminescence Study of Interface Defects in Bonded Silicon Wafers

Nevin, W.A., Gay, D.L., Blackstone, S., Higgs, V.

Electrochemical Society
6 国際会議録 SURFACE INFRARED STUDIED OF OSCILLATORY CO OXIDATION OVER PLATINUM

Burrows, V. A., Sundaresan, S., Chabal, V. J., Christman, S. B.

American Institute of Chemical Engineers
12 国際会議録 Infrared Spectroscopy of Covalently Bonded Species on Silicon Surfaces: Deuterium, Chlorine, and Cobalt Tetracarbonyl

Luo, Huihong, Chidsey, Christopher E. D., Chabal, Yves

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12