Investigation of extreme anneal in SIMOX

Investigation of extreme anneal in SIMOX

著者名:

掲載資料名:

Proceedings of the Seventh International Symposium on Silicon-on-Insulator Technology and Devices

シリーズ名:

Electrochemical Society Proceedings Series

シリーズ巻号:

96-3

発行年:

1995

開始ページ:

63

終了ページ:

73

出版情報:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566771535 [1566771536]

言語:

英語

請求記号:

E23400/962142

資料種別:

国際会議録

詳細

TDL書誌ID:	ZA00013813
シリーズID:	PA00000028
会議名:	International Symposium on Silicon-on-Insulator Technology and Devices ; Electrochemical Society Meeting
回次:	7th ; 187th
会議開催地:	Los Angeles, California, USA
会議開催年:	1996.05.05-1996.05.10

類似資料:

1 国際会議録 Effects of the Chlorine Concentration in the Anneal Ambient on the Contamination and Surface Microroughness in SIMOX Anc, MJ., Krull, W.A., Alles, M.A. Electrochemical Society	7 国際会議録 Masks for extreme ultraviolet lithography Vernon,S.P., Kearney,P.A., Tong,W.M., Prisbrey,S., Larson,C., Moore,C.E., Weber,F.J., Cardinale,G.F., Yan,P., … SPIE - The International Society for Optical Engineering
2 国際会議録 Implications of thin buried-oxide for SIMOX circuit performance Alles, M., Krull, W., Allen, L. Electrochemical Society	8 国際会議録 A promising tool for measuring magnetic fields in stellar photospheres Ryde, N., Richter, M.J. ESA Publications Division
3 国際会議録 Experimental investigations of thermal conductivity of buried oxides in SIMOX and BESOI wafers Tenbroek, B.M., Whiting, G., Lee, M.S.L., Edwards, C.F., Redman-White, W. Electrochemical Society	9 国際会議録 Status of Philips' extreme UV source Pankert, J., Bergmann, K., Klein, J., Neff, W., Rosier, O., Seiwert, S., Smith, C., Probst, S., Vaudrevange, D., … SPIE - The International Society of Optical Engineering
4 国際会議録 CAVITY FORMATION IN SIMOX STRUCTURES El-Ghor, M. K., Pennycook, S. J., Sjoreen, T. P., White, C. W., Narayan, J. Materials Research Society	10 国際会議録 Porous silicon: electrochemical microstructuring, photoluminescence, and covalent modificaiton M. B. Prigozhin, P. Shiwsankar, W. R. Algar, U. J. Krull Society of Photo-optical Instrumentation Engineers
5 国際会議録 *HIGH TEMPERATURE ANNEALING OF SIMOX LAYERS: PHYSICAL MECHANISMS OF OXYGEN SEGREGATION Jaussaud, C., Margail, J., Stoemenos, J., Bruel, M. Materials Research Society	11 国際会議録 Spectropolarimetry of the classical T Tauri Star T Tau Daou, A.G., Johns-Krull, C.M., Valenti, J.A. ESA Publications Division
6 国際会議録 *HIGH TEMPERATURE ANNEALING OF SIMOX LAYERS PHYSICAL MECHANISMS OF OXYGEN SEGREGATION Jaussaud, C., Margail, J., Stoemenos, J., Bruel, M. Materials Research Society	12 国際会議録 Investigation of Trapping Properties in SIMOX Films by Photo-Irrduced Current Transient Spectroscopy Papioannou,G., Ioannou-Sougleridis,V., Cristoloveanu,S., Bruel,M., Hemment,P. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12