Effect of oxidising ambient on the buried oxide synthesis in low-dose SIMOX wafers
- 著者名:
Jablonski, J Miyanuwa, Y Mchedlid:e, T R Saito, M Katayama, T Imai, M Nakashima, S - 掲載資料名:
- Proceedings of the Seventh International Symposium on Silicon-on-Insulator Technology and Devices
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 96-3
- 発行年:
- 1995
- 開始ページ:
- 47
- 終了ページ:
- 52
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566771535 [1566771536]
- 言語:
- 英語
- 請求記号:
- E23400/962142
- 資料種別:
- 国際会議録
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