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Invisible defects in SOI, their process dependence and characterisation

著者名:
Sadana, D K  
掲載資料名:
Proceedings of the Seventh International Symposium on Silicon-on-Insulator Technology and Devices
シリーズ名:
Electrochemical Society Proceedings Series
シリーズ巻号:
96-3
発行年:
1995
開始ページ:
3
終了ページ:
17
出版情報:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566771535 [1566771536]
言語:
英語
請求記号:
E23400/962142
資料種別:
国際会議録

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