Integration of BPSG in a 0.25 mm DRAM Process
- 著者名:
Gambino, J.P. Jaso, M.A. Aochi, H. Tsunashima, Y. Peschke, M. Bronne, G.B. - 掲載資料名:
- ULSI science and technology, 1995 : proceedings of the Fifth International Symposium on Ultra Large Scale Integration Science and Technology
- シリーズ名:
- Electrochemical Society Proceedings Series
- シリーズ巻号:
- 95-5
- 発行年:
- 1995
- 開始ページ:
- 339
- 終了ページ:
- 346
- 出版情報:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566770996 [1566770998]
- 言語:
- 英語
- 請求記号:
- E23400/952065
- 資料種別:
- 国際会議録
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